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This case study describes the invention, development and subsequent commercial application of the floating low-energy ion gun (FLIG), a key enabling technology for high-resolution depth profiling, in particular of semiconductor devices. Following its invention at the University of Warwick, the FLIG was commercialised and now plays an important role in the semiconductor industry as a key analytical instrument. Intel and its competitors have used the FLIG in developing specific technologies, such as the PentiumTM, XeonfTM and CoreTM i7 processors. Its impact extends beyond the electronics industry to consumers worldwide since the FLIG has played a key role in the development of multicore processors for personal computers, intense low-energy lighting for automotive and civil engineering, mobile telecommunications technology, and many other areas of advanced electronic, and other material, technologies. This invention has also led directly to an ISO standard for depth resolution.
The Optical and Semiconductor Devices group led by Richard Syms has been a major innovator in fabrication methods for 3D silicon microstructures, and has developed a wide range of novel devices and techniques based on these innovations. T he impact of their research has been to:
I1) bring the power of mass spectrometry to individual chemists' lab benches and fume hoods, raising their effectiveness and productivity through the launch in 2011 of the world's first commercial desk-top mass spectrometer by Microsaic Systems plc, a start-up company founded by members of the group;
I2) create a second start-up company, Nexeon Ltd, to manufacture nanostructured silicon anode materials, resulting in reduced battery size and weight for electric vehicles and portable electronics;
I3) add to mankind's journey of discovery in space with NASA's Phoenix Mars Mission in 2008, as part of the Atomic Force Microscope team, helping to investigate the presence of liquid water on the surface of Mars.
An advanced plasma source based on novel engineering has been developed and proven in conjunction with Thin Film Solutions Ltd (TFSL). This source is retrofittable to existing electron- beam deposition systems and significantly improves the properties of thin films and advanced optical filters. TFSL has produced commercial products based on this source and has achieved sales to date of £2.3 million (letter from CEO of TFSL provided) as the new technology has been widely adopted in the optical filter industry.
The microscopy facilities in the Biomedical Sciences Research Institute of the University of Ulster have been vastly improved through our collaboration with FEI, the largest European EM manufacturer, which has led them to manufacture a cryostage dual-beam instrument of our design with unique capabilities, and to set up their European reference laboratory here. This has generated two further sets of impacts: collaboration and consultancy with various firms wishing to use our advanced imaging facilities, and advice to national, EU and global bodies on the novel cytotoxic hazards of nanoparticles, a major but optically invisible by-product of modern industry, and consequent public health risks.
The University of Southampton's distinguished body of work on the design of technology for gamma-ray detection and imaging has informed new counter-terrorism practices. Technological advances arising from the research have been crucial to delivering significant benefits in the fields of homeland security and nuclear safety — the latter particularly in the wake of the 2011 Fukushima disaster. A spin-out company, Symetrica, currently employs 26 people in the UK and the USA, has a forecast turnover of more than £10 million for 2013-14 and has been recognised as an example of best practice. It is a technological leader in the field of radioactive isotope identification.
The performance of absolute distance measuring systems has been improved in terms of accuracy, traceability, reliability and cost through the introduction of new methodology arising from research at the University of Oxford. This has brought commercial benefit to a German company making measurement systems, through the creation of a new product line. New capabilities for measurement have been delivered to a first customer in Germany. The research has also resulted in the establishment of new activity at the National Physical Laboratory, and influenced UK and European technology roadmaps for future manufacturing.
Diffusion bonding (DB) is well-known for producing structured materials with fine scale features and is a critical technology for high efficiency reactors, e.g. heat exchangers and fuel cells, but currently equipment is slow and expensive (and there are size limitations to the `assemblies' that can be built). The University has researched and developed, with industry partners, a rapid affordable diffusion bonding (ADB) process involving direct heating to provide appropriate temperature and stress states and utilising flexible ultra-insulation (vacuum) for pressing titanium (and now aluminium) sheets together. The process operates at low stresses thus avoiding `channel' collapse. Investment is taking place in the partner companies to exploit the technology. A breakthrough has been achieved in the chemical machining of three dimensional structures for laminar flow technology assemblies in aluminium and titanium, that can be built by ADB.
Space science and medicine share a fundamental requirement for radiation sensors of the highest possible sensitivity. The development of imaging detectors for major X-ray observatories such as the European XMM-Newton and NASA's Chandra provided the impetus for a broad-based, intensive programme of deliberate technology transfer from the Unit's Space Research Centre (SRC) into the life sciences and medicine. The resulting impact now extends far beyond the exploratory provision of prototype sensor technologies for biomedical researchers into the full-scale commercial exploitation of those technologies with industry partners in the UK and Europe and, in three separate cases, to early-stage patient trials. Impact is being delivered in clinical specialisms from oncology to ophthalmology; from neurotoxicology to emergency medicine. The impact delivery mechanisms — the hospital-based Diagnostics Development Unit (DDU) and the campus-based Bioimaging Unit — are themselves novel and have achieved national prominence as examples of best practice in the drive for economic return even from established blue skies research.
A facility for precision diamond machining of optical components arose from research at Durham University to produce instruments for large telescopes, including NASA's James Webb Space telescope. This now provides a specialist service to industry, with contracts worth over £2.0M from >20 companies over the past 5 years. The users span applications including ophthalmics, automotive optics, microstructures for backlit displays and IR optics. An emerging application is the use of high precision machine metal moulds to reproduce ophthalmic lenses for spectacles. Examples include PixelOptics (USA) who make high-end electronically corrective eyewear, which has won several ophthalmic industry R&D awards, and Eyejusters (UK), which employs complex surface slide lens technology to provide low cost spectacles aimed at improving the lives of people in the developing world.
Today's global telecom systems are powered by technology developed at the University of Glasgow. This technology has been utilised, endorsed and developed by a series of internationally successful companies, facilitating multimillion pound investment from across Europe and the USA for the companies.
Gemfire Europe acquired the University of Glasgow IP and technology and between 2008 and 2012 launched a range of `green' products with reduced power consumption. The company's revenues reached $12m annually and in 2013, Gemfire was one of the world's top five planar lightwave circuit companies. Gemfire was bought by Kaiam, one of the world's market-leading optical networking companies in April 2013, stimulating further innovation and investment in the production of high-speed components for the global data networking market.